...the semiconductor necessary for the planar technology is Si because of the high quality SiO2 insulator film which is grown in situ on its surface. Ge is not suitable for this purpose because germanium oxide is not stable, so it cannot lend itself to give planar technology.
https://briefs.techconnect.org/wp-content/volumes/Nanotech2007v3/pdf/2100.pdf
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Date: 2019-09-06 04:23 am (UTC)